ALEXANDRIA, Va., Oct. 21 -- United States Patent no. 12,770,830, issued on Oct. 20, was assigned to SST INC. (Chiba, Japan). "High frequency reaction processing apparatus and high frequency reaction ... Read More
ALEXANDRIA, Va., Oct. 21 -- United States Patent no. 12,770,831, issued on Oct. 20, was assigned to NISSIN ION EQUIPMENT Co. LTD. (Koka-city, Japan). "Ion source and operating method thereof" was inv... Read More
ALEXANDRIA, Va., Oct. 21 -- United States Patent no. 12,770,832, issued on Oct. 20, was assigned to Lam Research Corp. (Fremont, Calif.). "Multi-location gas injection to improve uniformity in rapid ... Read More
ALEXANDRIA, Va., Oct. 21 -- United States Patent no. 12,770,833, issued on Oct. 20, was assigned to Applied Materials Inc. (Santa Clara, Calif.). "Plasma chamber with a multiphase rotating gas cross-... Read More
ALEXANDRIA, Va., Oct. 21 -- United States Patent no. 12,770,834, issued on Oct. 20, was assigned to ASM IP Holding B.V. (Almere, Netherlands). "Plasma enhanced epitaxial chemical vapor deposition sys... Read More
ALEXANDRIA, Va., Oct. 21 -- United States Patent no. 12,770,835, issued on Oct. 20, was assigned to Lam Research Corp. (Fremont, Calif.). "Coated part for plasma processing chamber" was invented by L... Read More
ALEXANDRIA, Va., Oct. 21 -- United States Patent no. 12,770,836, issued on Oct. 20, was assigned to SEMES Co. LTD. (Chungcheongnam-Do, South Korea). "Apparatus for treating substrate" was invented by... Read More
ALEXANDRIA, Va., Oct. 21 -- United States Patent no. 12,770,837, issued on Oct. 20, was assigned to NGK INSULATORS Ltd. (Nagoya-City, Japan). "Focus ring placement table" was invented by Seiya Inoue ... Read More
ALEXANDRIA, Va., Oct. 21 -- United States Patent no. 12,770,838, issued on Oct. 20, was assigned to Applied Materials Inc. (Santa Clara, Calif.). "Liner and edge ring to prevent gas diffusion" was in... Read More
ALEXANDRIA, Va., Oct. 21 -- United States Patent no. 12,770,839, issued on Oct. 20, was assigned to Lam Research Corp. (Fremont, Calif.). "Multi-station processing tools with station-varying support ... Read More